1/24/2011	2:19:41 PM	Bypass valve closed
1/24/2011	2:19:42 PM	Bypass valve opened
1/24/2011	2:21:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/24/2011	2:21:20 PM	Recipe started at 2:21 PM
1/24/2011	2:21:20 PM	H2 valve closed
1/24/2011	2:21:20 PM	BCl3 valve closed
1/24/2011	2:21:20 PM	PH3 valve closed
1/24/2011	2:21:20 PM	SiCl4 pre valve closed
1/24/2011	2:21:20 PM	SiCl4 post valve closed
1/24/2011	2:21:20 PM	Main Vac valve closed
1/24/2011	2:21:20 PM	Bypass valve closed
1/24/2011	2:21:20 PM	Bubbler valve closed
1/24/2011	2:21:20 PM	Helium valve opened
1/24/2011	2:21:20 PM	Helium MFC set to  500.000000
1/24/2011	2:21:20 PM	H2 MFC set to  0.000000
1/24/2011	2:21:20 PM	BCl3 MFC set to  0.000000
1/24/2011	2:21:20 PM	PHl3 MFC set to  0.000000
1/24/2011	2:21:20 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:21:20 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:21:21 PM	Tube furnace set to 0
1/24/2011	2:22:02 PM	Run aborted at 2:22 PM
1/24/2011	2:22:02 PM	Helium valve closed
1/24/2011	2:22:02 PM	H2 valve closed
1/24/2011	2:22:02 PM	BCl3 valve closed
1/24/2011	2:22:02 PM	PH3 valve closed
1/24/2011	2:22:02 PM	SiCl4 pre valve closed
1/24/2011	2:22:02 PM	SiCl4 post valve closed
1/24/2011	2:22:02 PM	Bypass valve closed
1/24/2011	2:22:02 PM	Main Vac valve closed
1/24/2011	2:22:02 PM	Bubbler valve closed
1/24/2011	2:22:02 PM	Helium MFC set to  0.000000
1/24/2011	2:22:02 PM	H2 MFC set to  0.000000
1/24/2011	2:22:02 PM	BCl3 MFC set to  0.000000
1/24/2011	2:22:02 PM	PHl3 MFC set to  0.000000
1/24/2011	2:22:02 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:22:02 PM	Tube furnace set to 0
1/24/2011	2:22:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/24/2011	2:22:13 PM	Bypass valve opened
1/24/2011	2:22:57 PM	Main Vac valve opened
1/24/2011	2:24:46 PM	Helium MFC set to  500.000000
1/24/2011	2:24:49 PM	Helium valve opened
1/24/2011	2:25:33 PM	Main Vac valve closed
1/24/2011	2:25:34 PM	Bypass valve closed
1/24/2011	2:25:45 PM	Helium valve closed
1/24/2011	2:25:51 PM	Helium valve opened
1/24/2011	2:27:04 PM	Bubbler valve opened
1/24/2011	2:27:33 PM	H2 MFC set to  500.000000
1/24/2011	2:27:35 PM	H2 valve opened
1/24/2011	2:27:36 PM	Helium valve closed
1/24/2011	2:27:49 PM	Tube furnace set to 500
1/24/2011	2:28:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/24/2011	2:28:13 PM	Recipe started at 2:28 PM
1/24/2011	2:28:13 PM	Helium valve closed
1/24/2011	2:28:13 PM	H2 valve closed
1/24/2011	2:28:13 PM	BCl3 valve closed
1/24/2011	2:28:13 PM	PH3 valve closed
1/24/2011	2:28:13 PM	SiCl4 pre valve closed
1/24/2011	2:28:13 PM	SiCl4 post valve closed
1/24/2011	2:28:13 PM	Main Vac valve closed
1/24/2011	2:28:13 PM	Bypass valve closed
1/24/2011	2:28:13 PM	Bubbler valve closed
1/24/2011	2:28:13 PM	Helium MFC set to  0.000000
1/24/2011	2:28:13 PM	H2 MFC set to  0.000000
1/24/2011	2:28:13 PM	BCl3 MFC set to  0.000000
1/24/2011	2:28:13 PM	PHl3 MFC set to  0.000000
1/24/2011	2:28:13 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:28:13 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:28:13 PM	Tube furnace set to 0
1/24/2011	2:28:14 PM	Run finished at 2:28 PM
1/24/2011	2:28:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/24/2011	2:28:38 PM	Helium MFC set to  500.000000
1/24/2011	2:28:42 PM	Helium valve opened
1/24/2011	2:28:44 PM	Bubbler valve opened
1/24/2011	2:29:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/24/2011	2:29:07 PM	Recipe started at 2:29 PM
1/24/2011	2:29:07 PM	Helium valve closed
1/24/2011	2:29:07 PM	H2 valve closed
1/24/2011	2:29:07 PM	BCl3 valve closed
1/24/2011	2:29:07 PM	PH3 valve closed
1/24/2011	2:29:07 PM	SiCl4 pre valve closed
1/24/2011	2:29:07 PM	SiCl4 post valve closed
1/24/2011	2:29:07 PM	Main Vac valve closed
1/24/2011	2:29:07 PM	Bypass valve closed
1/24/2011	2:29:07 PM	Bubbler valve closed
1/24/2011	2:29:07 PM	Helium MFC set to  0.000000
1/24/2011	2:29:07 PM	H2 MFC set to  0.000000
1/24/2011	2:29:07 PM	BCl3 MFC set to  0.000000
1/24/2011	2:29:07 PM	PHl3 MFC set to  0.000000
1/24/2011	2:29:07 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:29:07 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:29:07 PM	Tube furnace set to 0
1/24/2011	2:29:08 PM	Run finished at 2:29 PM
1/24/2011	2:29:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/24/2011	2:29:11 PM	Program exited cleanly
1/24/2011	2:29:12 PM	Program started normally
1/24/2011	2:29:12 PM	Helium valve closed
1/24/2011	2:29:12 PM	H2 valve closed
1/24/2011	2:29:12 PM	BCl3 valve closed
1/24/2011	2:29:12 PM	PH3 valve closed
1/24/2011	2:29:12 PM	SiCl4 pre valve closed
1/24/2011	2:29:12 PM	SiCl4 post valve closed
1/24/2011	2:29:12 PM	Main Vac valve closed
1/24/2011	2:29:12 PM	Bypass valve closed
1/24/2011	2:29:12 PM	Bubbler valve closed
1/24/2011	2:29:12 PM	Helium MFC set to  0.000000
1/24/2011	2:29:12 PM	H2 MFC set to  0.000000
1/24/2011	2:29:12 PM	BCl3 MFC set to  0.000000
1/24/2011	2:29:12 PM	PHl3 MFC set to  0.000000
1/24/2011	2:29:12 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:29:12 PM	Bypass solenoid MFC set to  760.000000
1/24/2011	2:29:12 PM	Tube furnace set to 0
1/24/2011	2:29:18 PM	Helium MFC set to  500.000000
1/24/2011	2:29:20 PM	Helium valve opened
1/24/2011	2:29:23 PM	Bubbler valve opened
1/24/2011	2:30:21 PM	Bubbler valve closed
1/24/2011	2:30:22 PM	Helium valve closed
1/24/2011	2:30:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/24/2011	2:30:25 PM	Recipe started at 2:30 PM
1/24/2011	2:30:25 PM	Helium valve closed
1/24/2011	2:30:25 PM	H2 valve closed
1/24/2011	2:30:25 PM	BCl3 valve closed
1/24/2011	2:30:25 PM	PH3 valve closed
1/24/2011	2:30:25 PM	SiCl4 pre valve closed
1/24/2011	2:30:25 PM	SiCl4 post valve closed
1/24/2011	2:30:25 PM	Main Vac valve closed
1/24/2011	2:30:25 PM	Bubbler valve closed
1/24/2011	2:30:25 PM	Bypass valve opened
1/24/2011	2:30:25 PM	Helium MFC set to  0.000000
1/24/2011	2:30:25 PM	H2 MFC set to  0.000000
1/24/2011	2:30:25 PM	BCl3 MFC set to  0.000000
1/24/2011	2:30:25 PM	PHl3 MFC set to  0.000000
1/24/2011	2:30:25 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:30:25 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:30:25 PM	Tube furnace set to 0
1/24/2011	2:30:47 PM	Helium valve closed
1/24/2011	2:30:47 PM	H2 valve closed
1/24/2011	2:30:47 PM	BCl3 valve closed
1/24/2011	2:30:47 PM	PH3 valve closed
1/24/2011	2:30:47 PM	SiCl4 pre valve closed
1/24/2011	2:30:47 PM	SiCl4 post valve closed
1/24/2011	2:30:47 PM	Bubbler valve closed
1/24/2011	2:30:47 PM	Main Vac valve opened
1/24/2011	2:30:47 PM	Bypass valve opened
1/24/2011	2:30:47 PM	Helium MFC set to  0.000000
1/24/2011	2:30:47 PM	H2 MFC set to  0.000000
1/24/2011	2:30:47 PM	BCl3 MFC set to  0.000000
1/24/2011	2:30:47 PM	PHl3 MFC set to  0.000000
1/24/2011	2:30:47 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:30:47 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:30:47 PM	Tube furnace set to 0
1/24/2011	2:30:48 PM	Run finished at 2:30 PM
1/24/2011	2:30:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/24/2011	2:35:16 PM	Program exited cleanly
1/24/2011	2:35:17 PM	Program started normally
1/24/2011	2:35:17 PM	Helium valve closed
1/24/2011	2:35:17 PM	H2 valve closed
1/24/2011	2:35:17 PM	BCl3 valve closed
1/24/2011	2:35:17 PM	PH3 valve closed
1/24/2011	2:35:17 PM	SiCl4 pre valve closed
1/24/2011	2:35:17 PM	SiCl4 post valve closed
1/24/2011	2:35:17 PM	Main Vac valve closed
1/24/2011	2:35:17 PM	Bypass valve closed
1/24/2011	2:35:17 PM	Bubbler valve closed
1/24/2011	2:35:17 PM	Helium MFC set to  0.000000
1/24/2011	2:35:17 PM	H2 MFC set to  0.000000
1/24/2011	2:35:17 PM	BCl3 MFC set to  0.000000
1/24/2011	2:35:17 PM	PHl3 MFC set to  0.000000
1/24/2011	2:35:17 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:35:17 PM	Bypass solenoid MFC set to  760.000000
1/24/2011	2:35:18 PM	Tube furnace set to 0
1/24/2011	2:35:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/24/2011	2:35:29 PM	Recipe started at 2:35 PM
1/24/2011	2:35:29 PM	Helium valve closed
1/24/2011	2:35:29 PM	H2 valve closed
1/24/2011	2:35:29 PM	BCl3 valve closed
1/24/2011	2:35:29 PM	PH3 valve closed
1/24/2011	2:35:29 PM	SiCl4 pre valve closed
1/24/2011	2:35:29 PM	SiCl4 post valve closed
1/24/2011	2:35:29 PM	Main Vac valve closed
1/24/2011	2:35:29 PM	Bubbler valve closed
1/24/2011	2:35:29 PM	Bypass valve opened
1/24/2011	2:35:29 PM	Helium MFC set to  0.000000
1/24/2011	2:35:29 PM	H2 MFC set to  0.000000
1/24/2011	2:35:29 PM	BCl3 MFC set to  0.000000
1/24/2011	2:35:29 PM	PHl3 MFC set to  0.000000
1/24/2011	2:35:29 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:35:29 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:35:29 PM	Tube furnace set to 0
1/24/2011	2:35:29 PM	Helium valve closed
1/24/2011	2:35:29 PM	H2 valve closed
1/24/2011	2:35:29 PM	BCl3 valve closed
1/24/2011	2:35:29 PM	PH3 valve closed
1/24/2011	2:35:29 PM	SiCl4 pre valve closed
1/24/2011	2:35:29 PM	SiCl4 post valve closed
1/24/2011	2:35:29 PM	Bubbler valve closed
1/24/2011	2:35:29 PM	Main Vac valve opened
1/24/2011	2:35:29 PM	Bypass valve opened
1/24/2011	2:35:29 PM	Helium MFC set to  0.000000
1/24/2011	2:35:29 PM	H2 MFC set to  0.000000
1/24/2011	2:35:29 PM	BCl3 MFC set to  0.000000
1/24/2011	2:35:29 PM	PHl3 MFC set to  0.000000
1/24/2011	2:35:29 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:35:29 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:35:29 PM	Tube furnace set to 0
1/24/2011	2:35:30 PM	Run finished at 2:35 PM
1/24/2011	2:35:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/24/2011	2:35:35 PM	Main Vac valve closed
1/24/2011	2:35:35 PM	Bypass valve closed
1/24/2011	2:35:40 PM	Helium MFC set to  500.000000
1/24/2011	2:35:40 PM	Helium valve opened
1/24/2011	2:35:44 PM	Main Vac valve opened
1/24/2011	2:35:54 PM	Helium valve closed
1/24/2011	2:35:57 PM	Bypass valve opened
1/24/2011	2:36:02 PM	Helium valve opened
1/24/2011	2:37:21 PM	Main Vac valve closed
1/24/2011	2:37:22 PM	Bypass valve closed
1/24/2011	2:38:44 PM	Bubbler valve opened
1/24/2011	2:46:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/24/2011	2:46:42 PM	Recipe started at 2:46 PM
1/24/2011	2:46:42 PM	H2 valve closed
1/24/2011	2:46:42 PM	BCl3 valve closed
1/24/2011	2:46:42 PM	PH3 valve closed
1/24/2011	2:46:42 PM	SiCl4 pre valve closed
1/24/2011	2:46:42 PM	SiCl4 post valve closed
1/24/2011	2:46:42 PM	Main Vac valve closed
1/24/2011	2:46:42 PM	Bypass valve closed
1/24/2011	2:46:42 PM	Bubbler valve closed
1/24/2011	2:46:42 PM	Helium valve opened
1/24/2011	2:46:42 PM	Helium MFC set to  500.000000
1/24/2011	2:46:42 PM	H2 MFC set to  0.000000
1/24/2011	2:46:42 PM	BCl3 MFC set to  0.000000
1/24/2011	2:46:42 PM	PHl3 MFC set to  0.000000
1/24/2011	2:46:42 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:46:42 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:46:43 PM	Tube furnace set to 0
1/24/2011	2:46:43 PM	Helium valve closed
1/24/2011	2:46:43 PM	H2 valve closed
1/24/2011	2:46:43 PM	BCl3 valve closed
1/24/2011	2:46:43 PM	PH3 valve closed
1/24/2011	2:46:43 PM	SiCl4 pre valve closed
1/24/2011	2:46:43 PM	SiCl4 post valve closed
1/24/2011	2:46:43 PM	Main Vac valve closed
1/24/2011	2:46:43 PM	Bypass valve closed
1/24/2011	2:46:43 PM	Bubbler valve closed
1/24/2011	2:46:43 PM	Helium MFC set to  0.000000
1/24/2011	2:46:43 PM	H2 MFC set to  0.000000
1/24/2011	2:46:43 PM	BCl3 MFC set to  0.000000
1/24/2011	2:46:43 PM	PHl3 MFC set to  0.000000
1/24/2011	2:46:43 PM	SiCl4 MFC set to  0.000000
1/24/2011	2:46:43 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	2:46:43 PM	Tube furnace set to 0
1/24/2011	2:46:43 PM	Run finished at 2:46 PM
1/24/2011	2:46:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/24/2011	3:23:24 PM	Recipe started at 3:23 PM
1/24/2011	3:23:24 PM	Helium valve closed
1/24/2011	3:23:24 PM	H2 valve closed
1/24/2011	3:23:24 PM	BCl3 valve closed
1/24/2011	3:23:24 PM	PH3 valve closed
1/24/2011	3:23:24 PM	SiCl4 pre valve closed
1/24/2011	3:23:24 PM	SiCl4 post valve closed
1/24/2011	3:23:24 PM	Main Vac valve closed
1/24/2011	3:23:24 PM	Bubbler valve closed
1/24/2011	3:23:24 PM	Bypass valve opened
1/24/2011	3:23:24 PM	Helium MFC set to  0.000000
1/24/2011	3:23:24 PM	H2 MFC set to  0.000000
1/24/2011	3:23:24 PM	BCl3 MFC set to  0.000000
1/24/2011	3:23:24 PM	PHl3 MFC set to  0.000000
1/24/2011	3:23:24 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:23:24 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:23:25 PM	Tube furnace set to 0
1/24/2011	3:24:05 PM	Run aborted at 3:24 PM
1/24/2011	3:24:05 PM	Helium valve closed
1/24/2011	3:24:05 PM	H2 valve closed
1/24/2011	3:24:05 PM	BCl3 valve closed
1/24/2011	3:24:05 PM	PH3 valve closed
1/24/2011	3:24:05 PM	SiCl4 pre valve closed
1/24/2011	3:24:05 PM	SiCl4 post valve closed
1/24/2011	3:24:05 PM	Bypass valve closed
1/24/2011	3:24:05 PM	Main Vac valve closed
1/24/2011	3:24:05 PM	Bubbler valve closed
1/24/2011	3:24:05 PM	Helium MFC set to  0.000000
1/24/2011	3:24:05 PM	H2 MFC set to  0.000000
1/24/2011	3:24:05 PM	BCl3 MFC set to  0.000000
1/24/2011	3:24:05 PM	PHl3 MFC set to  0.000000
1/24/2011	3:24:05 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:24:05 PM	Tube furnace set to 0
1/24/2011	3:27:02 PM	Recipe started at 3:27 PM
1/24/2011	3:27:02 PM	Helium valve closed
1/24/2011	3:27:02 PM	H2 valve closed
1/24/2011	3:27:02 PM	BCl3 valve closed
1/24/2011	3:27:02 PM	PH3 valve closed
1/24/2011	3:27:02 PM	SiCl4 pre valve closed
1/24/2011	3:27:02 PM	SiCl4 post valve closed
1/24/2011	3:27:02 PM	Main Vac valve closed
1/24/2011	3:27:02 PM	Bubbler valve closed
1/24/2011	3:27:02 PM	Bypass valve opened
1/24/2011	3:27:02 PM	Helium MFC set to  0.000000
1/24/2011	3:27:02 PM	H2 MFC set to  0.000000
1/24/2011	3:27:02 PM	BCl3 MFC set to  0.000000
1/24/2011	3:27:02 PM	PHl3 MFC set to  0.000000
1/24/2011	3:27:02 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:27:02 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:27:02 PM	Tube furnace set to 0
1/24/2011	3:27:38 PM	Helium valve closed
1/24/2011	3:27:38 PM	H2 valve closed
1/24/2011	3:27:38 PM	BCl3 valve closed
1/24/2011	3:27:38 PM	PH3 valve closed
1/24/2011	3:27:38 PM	SiCl4 pre valve closed
1/24/2011	3:27:38 PM	SiCl4 post valve closed
1/24/2011	3:27:38 PM	Bubbler valve closed
1/24/2011	3:27:38 PM	Main Vac valve opened
1/24/2011	3:27:38 PM	Bypass valve opened
1/24/2011	3:27:38 PM	Helium MFC set to  0.000000
1/24/2011	3:27:38 PM	H2 MFC set to  0.000000
1/24/2011	3:27:38 PM	BCl3 MFC set to  0.000000
1/24/2011	3:27:38 PM	PHl3 MFC set to  0.000000
1/24/2011	3:27:38 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:27:38 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:27:38 PM	Tube furnace set to 0
1/24/2011	3:27:46 PM	H2 valve closed
1/24/2011	3:27:46 PM	BCl3 valve closed
1/24/2011	3:27:46 PM	PH3 valve closed
1/24/2011	3:27:46 PM	SiCl4 pre valve closed
1/24/2011	3:27:46 PM	SiCl4 post valve closed
1/24/2011	3:27:46 PM	Bubbler valve closed
1/24/2011	3:27:46 PM	Helium valve opened
1/24/2011	3:27:46 PM	Main Vac valve opened
1/24/2011	3:27:46 PM	Bypass valve opened
1/24/2011	3:27:46 PM	Helium MFC set to  500.000000
1/24/2011	3:27:46 PM	H2 MFC set to  0.000000
1/24/2011	3:27:46 PM	BCl3 MFC set to  0.000000
1/24/2011	3:27:46 PM	PHl3 MFC set to  0.000000
1/24/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:27:46 PM	Tube furnace set to 0
1/24/2011	3:30:46 PM	H2 valve closed
1/24/2011	3:30:46 PM	BCl3 valve closed
1/24/2011	3:30:46 PM	PH3 valve closed
1/24/2011	3:30:46 PM	SiCl4 pre valve closed
1/24/2011	3:30:46 PM	SiCl4 post valve closed
1/24/2011	3:30:46 PM	Main Vac valve closed
1/24/2011	3:30:46 PM	Bypass valve closed
1/24/2011	3:30:46 PM	Bubbler valve closed
1/24/2011	3:30:46 PM	Helium valve opened
1/24/2011	3:30:46 PM	Helium MFC set to  500.000000
1/24/2011	3:30:46 PM	H2 MFC set to  0.000000
1/24/2011	3:30:46 PM	BCl3 MFC set to  0.000000
1/24/2011	3:30:46 PM	PHl3 MFC set to  0.000000
1/24/2011	3:30:46 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:30:46 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:30:46 PM	Tube furnace set to 100
1/24/2011	3:32:09 PM	H2 valve closed
1/24/2011	3:32:09 PM	BCl3 valve closed
1/24/2011	3:32:09 PM	PH3 valve closed
1/24/2011	3:32:09 PM	SiCl4 pre valve closed
1/24/2011	3:32:09 PM	SiCl4 post valve closed
1/24/2011	3:32:09 PM	Main Vac valve closed
1/24/2011	3:32:09 PM	Bypass valve closed
1/24/2011	3:32:09 PM	Helium valve opened
1/24/2011	3:32:09 PM	Bubbler valve opened
1/24/2011	3:32:09 PM	Helium MFC set to  500.000000
1/24/2011	3:32:09 PM	H2 MFC set to  0.000000
1/24/2011	3:32:09 PM	BCl3 MFC set to  0.000000
1/24/2011	3:32:09 PM	PHl3 MFC set to  0.000000
1/24/2011	3:32:09 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:32:09 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:32:09 PM	Tube furnace set to 500
1/24/2011	3:32:15 PM	Helium valve closed
1/24/2011	3:32:15 PM	H2 valve closed
1/24/2011	3:32:15 PM	BCl3 valve closed
1/24/2011	3:32:15 PM	PH3 valve closed
1/24/2011	3:32:15 PM	SiCl4 pre valve closed
1/24/2011	3:32:15 PM	SiCl4 post valve closed
1/24/2011	3:32:15 PM	Main Vac valve closed
1/24/2011	3:32:15 PM	Bubbler valve closed
1/24/2011	3:32:15 PM	Bypass valve closed
1/24/2011	3:32:15 PM	Helium MFC set to  0.000000
1/24/2011	3:32:15 PM	H2 MFC set to  0.000000
1/24/2011	3:32:15 PM	BCl3 MFC set to  0.000000
1/24/2011	3:32:15 PM	PHl3 MFC set to  0.000000
1/24/2011	3:32:15 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:32:15 PM	Bypass solenoid MFC set to  760.000000
1/24/2011	3:32:15 PM	Tube furnace set to 0
1/24/2011	3:32:15 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
1/24/2011	3:32:32 PM	Run aborted at 3:32 PM
1/24/2011	3:34:12 PM	Recipe started at 3:34 PM
1/24/2011	3:34:12 PM	Helium valve closed
1/24/2011	3:34:12 PM	H2 valve closed
1/24/2011	3:34:12 PM	BCl3 valve closed
1/24/2011	3:34:12 PM	PH3 valve closed
1/24/2011	3:34:12 PM	SiCl4 pre valve closed
1/24/2011	3:34:12 PM	SiCl4 post valve closed
1/24/2011	3:34:12 PM	Main Vac valve closed
1/24/2011	3:34:12 PM	Bubbler valve closed
1/24/2011	3:34:12 PM	Bypass valve opened
1/24/2011	3:34:12 PM	Helium MFC set to  0.000000
1/24/2011	3:34:12 PM	H2 MFC set to  0.000000
1/24/2011	3:34:12 PM	BCl3 MFC set to  0.000000
1/24/2011	3:34:12 PM	PHl3 MFC set to  0.000000
1/24/2011	3:34:12 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:34:12 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:34:12 PM	Tube furnace set to 0
1/24/2011	3:34:34 PM	Helium valve closed
1/24/2011	3:34:34 PM	H2 valve closed
1/24/2011	3:34:34 PM	BCl3 valve closed
1/24/2011	3:34:34 PM	PH3 valve closed
1/24/2011	3:34:34 PM	SiCl4 pre valve closed
1/24/2011	3:34:34 PM	SiCl4 post valve closed
1/24/2011	3:34:34 PM	Bubbler valve closed
1/24/2011	3:34:34 PM	Main Vac valve opened
1/24/2011	3:34:34 PM	Bypass valve opened
1/24/2011	3:34:34 PM	Helium MFC set to  0.000000
1/24/2011	3:34:34 PM	H2 MFC set to  0.000000
1/24/2011	3:34:34 PM	BCl3 MFC set to  0.000000
1/24/2011	3:34:34 PM	PHl3 MFC set to  0.000000
1/24/2011	3:34:34 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:34:34 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:34:34 PM	Tube furnace set to 0
1/24/2011	3:34:44 PM	H2 valve closed
1/24/2011	3:34:44 PM	BCl3 valve closed
1/24/2011	3:34:44 PM	PH3 valve closed
1/24/2011	3:34:44 PM	SiCl4 pre valve closed
1/24/2011	3:34:44 PM	SiCl4 post valve closed
1/24/2011	3:34:44 PM	Bubbler valve closed
1/24/2011	3:34:44 PM	Helium valve opened
1/24/2011	3:34:44 PM	Main Vac valve opened
1/24/2011	3:34:44 PM	Bypass valve opened
1/24/2011	3:34:44 PM	Helium MFC set to  500.000000
1/24/2011	3:34:44 PM	H2 MFC set to  0.000000
1/24/2011	3:34:44 PM	BCl3 MFC set to  0.000000
1/24/2011	3:34:44 PM	PHl3 MFC set to  0.000000
1/24/2011	3:34:44 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:34:44 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:34:44 PM	Tube furnace set to 0
1/24/2011	3:34:51 PM	H2 valve closed
1/24/2011	3:34:51 PM	BCl3 valve closed
1/24/2011	3:34:51 PM	PH3 valve closed
1/24/2011	3:34:51 PM	SiCl4 pre valve closed
1/24/2011	3:34:51 PM	SiCl4 post valve closed
1/24/2011	3:34:51 PM	Main Vac valve closed
1/24/2011	3:34:51 PM	Bypass valve closed
1/24/2011	3:34:51 PM	Bubbler valve closed
1/24/2011	3:34:51 PM	Helium valve opened
1/24/2011	3:34:51 PM	Helium MFC set to  500.000000
1/24/2011	3:34:51 PM	H2 MFC set to  0.000000
1/24/2011	3:34:51 PM	BCl3 MFC set to  0.000000
1/24/2011	3:34:51 PM	PHl3 MFC set to  0.000000
1/24/2011	3:34:51 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:34:51 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:34:51 PM	Tube furnace set to 100
1/24/2011	3:36:12 PM	H2 valve closed
1/24/2011	3:36:12 PM	BCl3 valve closed
1/24/2011	3:36:12 PM	PH3 valve closed
1/24/2011	3:36:12 PM	SiCl4 pre valve closed
1/24/2011	3:36:12 PM	SiCl4 post valve closed
1/24/2011	3:36:12 PM	Main Vac valve closed
1/24/2011	3:36:12 PM	Bypass valve closed
1/24/2011	3:36:12 PM	Helium valve opened
1/24/2011	3:36:12 PM	Bubbler valve opened
1/24/2011	3:36:12 PM	Helium MFC set to  500.000000
1/24/2011	3:36:12 PM	H2 MFC set to  0.000000
1/24/2011	3:36:12 PM	BCl3 MFC set to  0.000000
1/24/2011	3:36:12 PM	PHl3 MFC set to  0.000000
1/24/2011	3:36:12 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:36:12 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:36:12 PM	Tube furnace set to 500
1/24/2011	3:42:45 PM	Helium valve closed
1/24/2011	3:42:45 PM	BCl3 valve closed
1/24/2011	3:42:45 PM	PH3 valve closed
1/24/2011	3:42:45 PM	SiCl4 pre valve closed
1/24/2011	3:42:45 PM	SiCl4 post valve closed
1/24/2011	3:42:45 PM	Main Vac valve closed
1/24/2011	3:42:45 PM	Bypass valve closed
1/24/2011	3:42:45 PM	H2 valve opened
1/24/2011	3:42:45 PM	Bubbler valve opened
1/24/2011	3:42:45 PM	Helium MFC set to  0.000000
1/24/2011	3:42:45 PM	H2 MFC set to  500.000000
1/24/2011	3:42:45 PM	BCl3 MFC set to  0.000000
1/24/2011	3:42:45 PM	PHl3 MFC set to  0.000000
1/24/2011	3:42:45 PM	SiCl4 MFC set to  0.000000
1/24/2011	3:42:45 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	3:42:45 PM	Tube furnace set to 500
1/24/2011	4:42:45 PM	H2 valve closed
1/24/2011	4:42:45 PM	BCl3 valve closed
1/24/2011	4:42:45 PM	PH3 valve closed
1/24/2011	4:42:45 PM	SiCl4 pre valve closed
1/24/2011	4:42:45 PM	SiCl4 post valve closed
1/24/2011	4:42:45 PM	Main Vac valve closed
1/24/2011	4:42:45 PM	Bypass valve closed
1/24/2011	4:42:45 PM	Helium valve opened
1/24/2011	4:42:45 PM	Bubbler valve opened
1/24/2011	4:42:45 PM	Helium MFC set to  500.000000
1/24/2011	4:42:45 PM	H2 MFC set to  0.000000
1/24/2011	4:42:45 PM	BCl3 MFC set to  0.000000
1/24/2011	4:42:45 PM	PHl3 MFC set to  0.000000
1/24/2011	4:42:45 PM	SiCl4 MFC set to  0.000000
1/24/2011	4:42:45 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	4:42:45 PM	Tube furnace set to 0
1/24/2011	4:53:24 PM	Helium valve closed
1/24/2011	4:53:24 PM	H2 valve closed
1/24/2011	4:53:24 PM	BCl3 valve closed
1/24/2011	4:53:24 PM	PH3 valve closed
1/24/2011	4:53:24 PM	SiCl4 pre valve closed
1/24/2011	4:53:24 PM	SiCl4 post valve closed
1/24/2011	4:53:24 PM	Main Vac valve closed
1/24/2011	4:53:24 PM	Bypass valve closed
1/24/2011	4:53:24 PM	Bubbler valve closed
1/24/2011	4:53:24 PM	Helium MFC set to  0.000000
1/24/2011	4:53:24 PM	H2 MFC set to  0.000000
1/24/2011	4:53:24 PM	BCl3 MFC set to  0.000000
1/24/2011	4:53:24 PM	PHl3 MFC set to  0.000000
1/24/2011	4:53:24 PM	SiCl4 MFC set to  0.000000
1/24/2011	4:53:24 PM	Bypass solenoid MFC set to  0.000000
1/24/2011	4:53:24 PM	Tube furnace set to 0
1/24/2011	4:53:24 PM	Run finished at 4:53 PM
